Semiconductor device with self aligned end-to-end conductive line structure and method for forming the same

ABSTRACT

A method for forming semiconductor devices using damascene techniques provides self-aligned conductive lines that have an end-to-end spacing less than 60 nm without shorting. The method includes using at least one sacrificial hardmask layer to produce a mandrel and forming a void in the mandrel. The sacrificial hardmask layers are formed over a base material which is advantageously an insulating material. Another hardmask layer is also disposed over the base material and under the mandrel in some embodiments. Spacer material is formed alongside the mandrel and filling the void. The spacer material serves as a mask and at least one etching procedure is carried out to translate the pattern of the spacer material into the base material. The patterned base material includes trenches and raised portions. Conductive features are formed in the trenches using damascene techniques.

RELATED APPLICATIONS

The application is a continuation application of and claims priority toU.S. patent application Ser. No. 13/684,709 filed Nov. 26, 2012 andentitled Semiconductor Device with Self Aligned End-to-End ConductiveLine Structure and Method of Forming the Same, the contents of which arehereby incorporated by reference as if set forth in their entirety.

TECHNICAL FIELD

The disclosure relates to semiconductor devices and methods for formingthe same using damascene techniques and sacrificial hardmask layers.

BACKGROUND

In today's rapidly advancing semiconductor manufacturing industry, thereis a continued drive to produce feature sizes of smaller and smallerdimensions. Conductive lines are most critical to any integrated circuitor other semiconductor device as they interconnect the active devicesand carry current and signals that enable the semiconductor device tooperate. The drive to continue to decrease feature size applies toconductive lines. As levels of integration continue to increase, itbecomes even more advantageous to form increasingly smaller conductivelines, and to form conductive lines in close proximity to one anotherand without shorting to one another. This applies to conductive lines,also referred to as leads, that are adjacent one another and also toconductive lines that are aligned end-to-end, i.e. longitudinally.

Damascene techniques and other patterning techniques are available todefine conductive lines and other features and various processes areavailable to form the actual conductive lines. All of these techniqueshave limitations with respect to the minimum dimensions of theconductive features that can be achieved. There are also limitationswith respect to minimum spacing differences between adjacent conductivefeatures that can be achieved without shorting.

The present disclosure provides an advancement that enables thedefinition and formation of increasingly smaller conductive lines andincreasingly tighter spaced conductive features.

BRIEF DESCRIPTION OF THE DRAWING

The present disclosure is best understood from the following detaileddescription when read in conjunction with the accompanying drawing. Itis emphasized that, according to common practice, the various featuresof the drawing are not necessarily to scale. On the contrary, thedimensions of the various features may be arbitrarily expanded orreduced for clarity. Like numerals denote like features throughout thespecification and drawing.

FIGS. 1A and 1B through FIGS. 8A and 8B represent a sequence ofprocessing operations according to one embodiment of the disclosure.Each set of figures (e.g. FIGS. 4A, 4B) includes the A suffix figureshowing a perspective view and the B suffix figure showing a top, planview; and

FIG. 9 is a top view showing a subsequent step in the processingoperation sequence that follows the processing stage shown in FIGS. 8A,8B.

DETAILED DESCRIPTION

The disclosure provides various embodiments of processing operations andsequences of processing operations. The processing operations are usedto form a patterned base material that includes trenches within which aconductive pattern may be formed. In some embodiments, the sequence ofprocessing operations are used to form conductive lines. In someembodiments, the conductive lines are self aligned, end-to-end and aretightly spaced. In one embodiment, the conductive lines are selfaligned, end-to-end and are spaced apart by less than 60 nanometers. Theprocessing operations of the disclosure utilize one or more sacrificialhardmask layers in some embodiments. A line is formed from thesacrificial hardmask layer or layers and a cut or void is formed in theline. After a sequence of processing operations are carried out,damascene processing techniques are used to form conductive lines and inone embodiment the conductive lines are self aligned end-to-end andspaced apart by a dielectric material including a dielectric plug formedby utilizing the void formed in the line of sacrificial hardmask layeror layers.

Now turning to the figures, FIGS. 1A and 1B provide a perspective and atop, plan view, respectively, of a stage in the sequence of processingoperations according to the disclosure. FIG. 1A includes base material 3with hardmask layer 5 over base material 3. Sacrificial hardmaskmaterial 13 is disposed over hardmask layer 5 and sacrificial hardmaskmaterial 13 includes two sacrificial hardmask layers: first sacrificialhardmask layer 7 and second sacrificial hardmask layer 9, in theillustrated embodiment. In other embodiments, sacrificial hardmaskmaterial 13 includes additional sacrificial hardmask layers or only onesacrificial hardmask layer. First sacrificial hardmask layer 7 isdisposed over hardmask layer 5 and second sacrificial hardmask layer 9is disposed over first sacrificial hardmask layer 7 in the illustratedembodiment.

Base material 3 represents a semiconductor or other substrate in oneembodiment and in another embodiment, base material 3 represents a layeror composite layer of materials formed over a suitable substratematerial such as silicon or other materials used in the semiconductormanufacturing industry, in other embodiments. According to oneembodiment, base material 3 is an insulating layer such as an oxidelayer. In some embodiments, base material 3 is a low-k (“LK”) dielectricmaterial, an extreme low-k (“ELK”) dielectric material, an ultra LK(“ULK”) dielectric material, an interlevel dielectric material,phosphosilicate glass (“PSG”), undopted silicate glass (“USG”) or otherdielectric materials or silicon. Various methods such as chemical vapordeposition (“CVD”), or plasma enhanced chemical vapor deposition(“PECVD”) or other suitable deposition methods are used to form basematerial 3 in some embodiments but other suitable formation techniquesare used in other embodiments.

Hardmask layer 5 is formed of various suitable hardmask materials invarious embodiments. In some embodiments, hardmask layer 5 is formed ofTi, TiN, Ta, TaN or TiO but other suitable hardmask materials are usedin other embodiments. Hardmask layer 5 is formed using CVD or physicalvapor deposition (“PVD”) or other suitable deposition or other formationtechniques in other embodiments. First sacrificial hardmask layer 7 andsecond sacrificial hardmask layer 9 are formed of different suitablematerials in various embodiments. In one embodiment, first sacrificialhardmask layer is formed using spin coating, CVD or PECVD operations andis formed of spin-on carbon or other advanced patterning films (“APF”)such as amorphous carbon but other materials and other formationtechniques are used in other embodiments. Second sacrificial hardmasklayer 9 is formed used spin coating, CVD or atomic layer deposition(“ALD”) or other suitable formation methods in some embodiments. Secondsacrificial hardmask layer 9 is formed of SiN, SiON, or a bottomanti-reflective coating (“BARC”) such as a BARC with a high siliconcontent, in some embodiments but other suitable materials are used inother embodiments. Photoresist lines 11 are formed over secondsacrificial hardmask layer 9 and are sometimes referred to as mandrels.Various photoresist materials are used in various embodiments.

FIGS. 2A and 2B show the structure of FIGS. 1A and 1B after photoresistlines 11 are used as a mask and an etching operation is carried out toetch away exposed portions of first sacrificial hardmask layer 7 andsecond sacrificial hardmask layer 9 and after the further step ofremoving the photoresist lines 11. The structure in FIG. 2A showshardmask layer 5 disposed over base material 3 and sacrificial hardmasklines 15 disposed over hardmask layer 5. Each sacrificial hardmask line15 includes portions of first sacrificial hardmask layer 7 and secondsacrificial hardmask layer 9. Sacrificial hardmask lines 15 are alsosometimes referred to as mandrels.

FIGS. 3A and 3B show the structure of FIGS. 2A and 2B after a patternedphotoresist layer 21 is formed over the structure in FIGS. 2A, 2B.Patterned photoresist layer 21 includes a substantially planar uppersurface and covers the structure including sacrificial hardmask lines15. Opening 23 is formed in patterned photoresist layer 21 and exposes aportion of sacrificial hardmask line 15. Various photolithographictechniques are used to form opening 23. Smaller dimension 25 of opening23 is on the order of about 15-60 nm in one embodiment but otherdimensions are used in other embodiments. An etching operation is thenperformed on the structure of FIGS. 3A and 3B to successively etchsecond sacrificial hardmask layer 9 and first sacrificial hardmask layer7 that are exposed in opening 23 to form a cut in sacrificial hardmaskline 15. After this etching operation is carried out and after patternedphotoresist layer 21 is removed, the structures shown in FIGS. 4A, 4Bare produced.

FIGS. 4A and 4B show sacrificial hardmask lines 15 disposed over surface25 of hardmask layer 5. One of the illustrated sacrificial hardmasklines 15 includes void 31 therein. Alternatively stated, the sacrificialhardmask line 15 on the upper portion of FIG. 4B has been cut into twoseparate lines and separated by void 31. Width 29 of void 31 is on theorder of 15-60 nm or smaller in various embodiments but includedifferent dimensions in other embodiments.

FIGS. 5A and 5B show spacer material 33 formed over the structure shownin FIGS. 4A, 4B. Spacer material 33 is formed of SiO, SiN, SiO_(x)N_(y),TiO, TiN, Ta, TaN or AlO in various embodiments and is formed using ALD,CVD or other suitable deposition methods. Spacer material 33 is disposedon surface 25 of hardmask layer 5 and over sacrificial hardmask lines15. Spacer material 33 is formed using conformal deposition techniquesand therefore includes thinner portions 35 and thicker portions 37.Thinner portions 35 are disposed over surface 25 of hardmask layer 5 andalso over the tops of sacrificial hardmask lines 15. Thicker portions 37are disposed alongside sacrificial hardmask lines 15 and in voids 31.Notches 41 are formed at locations where spacer material 33 fills voids31 that were shown in FIGS. 4A and 4B.

An anisotropic etching procedure is then carried out to substantiallyuniformly recede spacer material 33, i.e. remove a thickness of spacermaterial 33 such that spacer material 33 remains in the locations ofthicker portions 37. The anisotropic etching procedure removes spacermaterial 33 from over sacrificial hardmask lines 15 and also exposessurface 25 of hardmask layer 5. After this anisotropic procedure iscarried out to recede the thickness of spacer material 33, a spacermaterial pattern is formed with spacer material 33 disposed alongsidehardmask lines 15 and filling void 31 that was shown in FIGS. 4A, 4B butnot in other areas. A subsequent processing operation is then used toselectively remove sacrificial hardmask lines 15 to produce thestructure shown in FIGS. 6A, 6B. FIGS. 6A, 6B show a pattern of spacermaterial including a plurality of spacer material features 45 disposedon surface 25 of hardmask layer 5. Bridge 47 is formed at the locationpreviously occupied by void 31 and indicated by notches 41.

Spacer material features 45 and bridge 47 form a spacer material patternand act as a mask during a subsequent etching operation that is carriedout to etch uncovered portions of hardmask layer 5. Hardmask layer 5 isetched to clear thereby exposing upper surface 49 of base material 3.Various suitable etching techniques and operations may be used. In someembodiments, spacer material 33 is then selectively removed to producethe structure shown in FIGS. 7A and 7B in which surface 25 of hardmasklayer 5 is exposed. The structures shown in FIGS. 7A and 7B includeexposed upper surface 49 of base material 3 and a pattern formed ofhardmask layer 5 including bridge 53. In the illustrated embodiment, thepattern of hardmask layer 5 includes lines 55 but other structures areformed in other embodiments.

The pattern of hardmask layer 5 including lines 55 and bridge 53 is thenused as a mask and an etching operation is carried out. In someembodiments the pattern of spacer material 33 still remains overhardmask layer 5 when the etching operation to etch base material 3, iscarried out. The etching operation etches base material 3 andessentially translates the spacer material pattern to base material 3.FIGS. 8A and 8B show base material 3 being partially etched. Inembodiments in which base material 3 is formed over a substrate, basematerial 3 may be etched to clear, i.e. openings are formed completelythrough base material 3. With base material 3 not completely etchedthrough, base surface 59 is created. Depth 63 varies in variousembodiments. Channels 65 and 67 are produced between raised sections 61.Bridge 53 now represents a spacing or gap between aligned channels 65that are aligned end-to-end such as more clearly shown in FIG. 8B.

Hardmask layer 5 is then removed from the structures shown in FIGS. 8Aand 8B resulting in patterned base material 3. In many embodiments, basematerial 3 is advantageously an insulating material. Channels 65 and 67remain between raised sections 61 and may alternatively be referred toas trenches or grooves. A pattern of a new material which may be aconductive material, is then formed within channels 67 and 65.

In some embodiments, a further material is formed over base material 3,filling channels 67 and aligned channels 65. A planarization techniqueis then carried out to remove the further material from regions overraised sections 61, thereby leaving the further material in regions notoccupied by raised sections 61, i.e. damascene patterning is carried outto remove the further material from over the tops of raised sections 61and form leads of the further material in channels 67 and 65. In someembodiments, according to damascene principles a conductive material isformed over base material 3. A subsequent planarization technique iscarried out to remove the conductive material from regions not occupiedby raised sections 61, thereby forming a pattern of conductive features.In some embodiments, the planarization technique is chemical mechanicalpolishing (“CMP”), but other polishing or other planarization techniquesare used in other embodiments.

FIG. 9 is a plan view showing the structure of FIGS. 8A and 8B afterhardmask layer 5 has been removed and after damascene techniques areused to form a conductive material in channels 65 and 67 by forming theconductive material over the structure then planarizing to remove theconductive material from over insulating lines 71. Conductive lines 69are disposed in areas not occupied by base material 3, i.e. conductivelines 69 fill former aligned channels 65 and channels 67. According tothe embodiment in which base material 3 is an insulating layer,conductive lines 69 are disposed between insulating lines 71 formed ofbase material 3. Conductive lines 69A and 69B are linearly alignedend-to-end and longitudinally spaced apart by insulating gap 75.Insulating gap 75 includes a width 79 which is along the lines of 20-50nm in some embodiments and successfully and completely isolates theconductive lines 69A and 69B from one another. Width 79 takes on otherdimensions in other embodiments. Adjacent parallel conductive lines 69are spaced apart by insulating line 71 which include a width 81 thatranges from 20-60 nm in some embodiments, but other widths are used inother embodiments. Conductive lines 69 include a width of about 20-60 nmin some embodiments but other widths are used in other embodiments. Thesubstructure shown in FIG. 9 represents a small portion of asemiconductor device and conductive lines 69 and 69A and 69B couple andinterconnect the various active devices and other interconnect featuresformed in other regions of a semiconductor device chip. Subsequentprocessing operations are then carried out to complete the manufactureof the integrated circuit or other semiconductor device, including thestructure described in the disclosure.

A method for forming semiconductor devices using damascene techniquesprovides self-aligned conductive lines that have an end-to-end spacingless than 60 nm without shorting. The method includes using at least onesacrificial hardmask layer to produce a mandrel and forming a void inthe mandrel. The sacrificial hardmask layers are formed over a basematerial which is advantageously an insulating material. Anotherhardmask layer is also disposed over the base material in someembodiments. A spacer material is formed alongside the mandrel andfilling the void. The spacer material serves as a mask and at least oneetching procedure is carried out to translate the pattern of the spacermaterial into the base material. The patterned base material includestrenches and raised portions. Materials are removed from over the basematerial and conductive features are formed in the trenches usingdamascene techniques.

According to one aspect, a method for forming a semiconductor device isprovided. The method comprises: providing a substrate with a materiallayer thereover and a hardmask layer over the material layer; patterningthe hardmask layer thereby forming at least one hardmask line; forming avoid in the hardmask line; forming spacer material over the substrate,including over the hardmask line, and filling the void; anisotropicallyetching portions of the spacer material to form a spacer pattern thatincludes the spacer material disposed along sides of the hardmask lineand filling the void, but not over the hardmask line. The method furthercomprises etching the material layer in areas not covered by the spacerpattern thereby forming a material layer pattern that includes trenches.

According to another aspect, a method for forming a semiconductor deviceis provided. The method comprises: providing a substrate with aninsulating layer thereover; forming a plurality of sacrificial hardmasklayers over the insulating layer; patterning the plurality ofsacrificial hardmask layers thereby forming at least one sacrificialhardmask line; forming a void in the sacrificial hardmask line; andforming a material pattern including material alongside the sacrificialhardmask line and filling the void. The method also comprises removingthe sacrificial hardmask line; using the material pattern as a mask andetching trenches into the insulating material; removing the material,thereby producing a pattern in the insulating material including thetrenches and raised portions; and filling the trenches with conductivematerial

According to yet another aspect, a method for forming a semiconductordevice is provided. The method comprises: providing a substrate with afirst material layer thereover and a second material layer over thefirst material layer; forming at least one sacrificial hardmask layerover the second material layer; patterning the at least one sacrificialhardmask layer thereby forming at least one sacrificial hardmask line;forming a void in the at least one sacrificial hardmask line; formingspacer material over the substrate, including over the sacrificialhardmask line, and filling the void; removing portions of the spacermaterial to form a spacer pattern that includes the spacer materialdisposed along sides of the at least one sacrificial hardmask line andfilling the void but not over the at least one sacrificial hardmaskline; removing the at least one sacrificial hardmask line; and etchingto transfer the spacer pattern into the first layer thereby forming afirst material layer pattern.

According to yet another aspect, a method for forming a semiconductordevice is provided. The method comprises: providing a substrate with amaterial layer thereover and a patterned hardmask material over thematerial layer, the patterned hardmask material including at least onehardmask line with a void therein; forming a spacer material patternincluding spacer material alongside the at least one hardmask line andfilling the void; and etching the material layer in areas not covered bythe spacer material pattern thereby forming a material layer patternthat includes trenches.

According to yet another aspect, a method for forming a semiconductordevice is provided. The method comprises: providing a substrate with amaterial layer thereover and a patterned hardmask layer over thematerial layer, the patterned hardmask layer including at least one setof linearly aligned hardmask lines with a void therebetween; formingspacer material over the substrate, including over the patternedhardmask layer, and filling the void; anisotropically etching portionsof the spacer material to form a spacer pattern that includes the spacermaterial disposed along sides of the hardmask lines of the set oflinearly aligned hardmask lines and filling the void but not over thehardmask lines; and removing the hardmask lines.

According to another aspect, a method for forming a semiconductor deviceis provided. The method comprises: forming a plurality of sacrificialhardmask layers over a material layer over a substrate; patterning anupper sacrificial hardmask layer of the plurality of sacrificialhardmask layers thereby forming at least one upper sacrificial hardmaskline with a void therein; forming a spacer material pattern includingspacer material alongside the at least one upper sacrificial hardmaskline and filling the void; removing the at least one upper sacrificialhardmask line; using the spacer material pattern as a mask and etching alower sacrificial hardmask layer of the plurality of sacrificialhardmask layers thereby forming a patterned lower sacrificial hardmasklayer including at least one set of adjacent parallel lower sacrificialhardmask lines with a bridge therebetween.

The preceding merely illustrates the principles of the disclosure. Itwill thus be appreciated that those of ordinary skill in the art will beable to devise various arrangements which, although not explicitlydescribed or shown herein, embody the principles of the disclosure andare included within its spirit and scope. Furthermore, all examples andconditional language recited herein are principally intended expresslyto be only for pedagogical purposes and to aid the reader inunderstanding the principles of the disclosure and the conceptscontributed by the inventors to furthering the art, and are to beconstrued as being without limitation to such specifically recitedexamples and conditions. Moreover, all statements herein recitingprinciples, aspects, and embodiments of the disclosure, as well asspecific examples thereof, are intended to encompass both structural andfunctional equivalents thereof. Additionally, it is intended that suchequivalents include both currently known equivalents and equivalentsdeveloped in the future, i.e., any elements developed that perform thesame function, regardless of structure.

This description of the exemplary embodiments is intended to be read inconnection with the figures of the accompanying drawing, which are to beconsidered part of the entire written description. In the description,relative terms such as “lower,” “upper,” “horizontal,” “vertical,”“above,” “below,” “up,” “down,” “top” and “bottom” as well asderivatives thereof (e.g., “horizontally,” “downwardly,” “upwardly,”etc.) should be construed to refer to the orientation as then describedor as shown in the drawing under discussion. These relative terms arefor convenience of description and do not require that the apparatus beconstructed or operated in a particular orientation. Terms concerningattachments, coupling and the like, such as “connected” and“interconnected,” refer to a relationship wherein structures are securedor attached to one another either directly or indirectly throughintervening structures, as well as both movable or rigid attachments orrelationships, unless expressly described otherwise.

Although the disclosure has been described in terms of exemplaryembodiments, it is not limited thereto. Rather, the appended claimsshould be construed broadly, to include other variants and embodimentsof the disclosure, which may be made by those of ordinary skill in theart without departing from the scope and range of equivalents of thedisclosure.

What is claimed is:
 1. A method for forming a semiconductor device, themethod comprising: providing a substrate with a material layer thereoverand a patterned hardmask material over the material layer, the patternedhardmask material including at least one hardmask line with a voidtherein; forming a spacer material pattern including spacer materialalongside the at least one hardmask line and filling the void; andetching the material layer in areas not covered by the spacer materialpattern thereby forming a material layer pattern that includes trenches.2. The method as in claim 1, further comprising removing the at leastone hardmask line prior to the etching.
 3. The method as in claim 2,wherein the material layer is an insulating material and furthercomprising, after the etching the material layer, removing the spacermaterial and forming a conductive material in the trenches.
 4. Themethod as in claim 1, wherein the forming the spacer material patterncomprises forming the spacer material over the substrate, including overthe patterned hardmask material and filling the void, andanisotropically etching portions of the spacer material to form thespacer material pattern.
 5. The method as in claim 1, wherein thepatterned hardmask material includes two hardmask layers and the spacermaterial comprises one of SiO, SiN, SiO_(x)N_(y), TiO, TiN, Ta, TaN andAlO.
 6. The method as in claim 5, wherein the two hardmask layerscomprise a lower hardmask layer formed of one of spin-on carbon andamorphous carbon and an upper hardmask layer formed of one of SiN, SiONand a silicon-containing antireflective coating (ARC).
 7. A method forforming a semiconductor device, the method comprising: providing asubstrate with a material layer thereover and a patterned hardmask layerover the material layer, the patterned hardmask layer including at leastone set of linearly aligned hardmask lines with a void therebetween;forming spacer material over the substrate, including over the patternedhardmask layer, and filling the void; anisotropically etching portionsof the spacer material to form a spacer pattern that includes the spacermaterial disposed along sides of the hardmask lines of the set oflinearly aligned hardmask lines and filling the void but not over thehardmask lines; and removing the hardmask lines.
 8. The method as inclaim 7, further comprising etching the material layer in areas notcovered by the spacer pattern thereby forming a material layer patternthat includes trenches.
 9. The method as in claim 8, wherein theproviding the substrate includes a further hardmask layer between thematerial layer and the patterned hardmask layer and wherein the etchingthe material layer further comprises etching the further hardmask layerprior to etching the material layer.
 10. The method as in claim 8,wherein the material layer is an insulating material and furthercomprising, after the etching the material layer, removing the spacermaterial and forming a conductive material in the trenches.
 11. Themethod as in claim 10, wherein the insulating material comprises one ofa low-k dielectric material, an extreme low-k dielectric material, anultra low-k dielectric material, an interlevel dielectric material, andphosphosilicate glass.
 12. The method as in claim 7, wherein theproviding the substrate includes forming a hardmask layer over thematerial layer, then patterning the hardmask layer to form the patternedhardmask layer including at least one set of linearly aligned hardmasklines with the void therebetween by coating with photoresist, patterningthe photoresist, and etching.
 13. A method for forming a semiconductordevice, the method comprising: forming a plurality of sacrificialhardmask layers over a material layer over a substrate; patterning anupper sacrificial hardmask layer of said plurality of sacrificialhardmask layers thereby forming at least one upper sacrificial hardmaskline with a void therein; forming a spacer material pattern includingspacer material alongside the at least one upper sacrificial hardmaskline and filling the void; removing the at least one upper sacrificialhardmask line; using the spacer material pattern as a mask and etching alower sacrificial hardmask layer of said plurality of sacrificialhardmask layers thereby forming a patterned lower sacrificial hardmasklayer including at least one set of adjacent parallel lower sacrificialhardmask lines with a bridge therebetween.
 14. The method as in claim13, further comprising using the patterned lower sacrificial hardmasklayer as a mask and etching the material layer.
 15. The method as inclaim 13, wherein the upper sacrificial hardmask layer comprises one ofSiN, SiON and a silicon-containing antireflective coating (ARC) and thelower sacrificial hardmask comprises one of spin-on carbon and amorphouscarbon.
 16. The method as in claim 14, wherein the etching the materiallayer comprises forming trenches in the material layer and furthercomprising removing the spacer material pattern after the etching andforming a conductive material in the trenches.
 17. The method as inclaim 16, wherein the material layer is an insulating layer, forming aconductive material in the trenches comprises forming a conductivematerial over raised portions of the material layer pattern and fillingthe trenches then removing the conductive layer from over the raisedportions of the material layer pattern.
 18. The method as in claim 13,wherein the forming the spacer material pattern comprises forming thespacer material over the substrate, including over the at least oneupper sacrificial hardmask line and filling the void, andanisotropically etching portions of the spacer material to form thespacer material pattern.
 19. The method as in claim 13, wherein at leastone of the sacrificial hardmask layers comprises one of spin-on carbonand amorphous carbon.
 20. The method as in claim 13, wherein the spacermaterial pattern comprises one of SiO, SiN, SiO_(x)N_(y), TiO, TiN, Ta,TaN and AlO.